%J 2015 IEEE International Ultrasonics Symposium, IUS 2015
%R 10.1109/ULTSYM.2015.0362
%O cited By 4; Conference of IEEE International Ultrasonics Symposium, IUS 2015 ; Conference Date: 21 October 2015 Through 24 October 2015; Conference Code:118680
%A M.S. Pandian
%A E. Marigo
%A M. Shunmugam
%A R.B. Hussain
%A C.T.W. Song
%A J.B.J. Din
%A C.B. Fei
%A V. Madhaven
%A A.K. Kantimahanti
%A A.F. Malik
%A V. Jeoti
%I Institute of Electrical and Electronics Engineers Inc.
%X In this paper we present a study on the surface acoustic wave propagation performance and coupling coefficient for a non-planar thin film Surface Acoustic Wave device (SAW). Piezoelectric Aluminum Nitride (AlN) thin film is deposited on top of the Inter Digital Transducer (IDT) by a non conformal physical vapor deposition process. Non-planarity around the transducer impedes the wave propagation, this effect is investigated using SAW delay lines. © 2015 IEEE.
%K Acoustic surface wave devices; Acoustic waves; Acoustics; Aluminum; Aluminum coatings; Aluminum nitride; Deposition; Nitrides; Physical vapor deposition; Piezoelectricity; Thin film devices; Thin films; Transducers; Ultrasonic transducers; Vapor deposition, Aluminum nitride (AlN); Coupling coefficient; Interdigital transducer; Physical vapor deposition process; Piezoelectric thin film devices; SAW delay line; Surface acoustic wave propagation; Thin film surfaces, Acoustic wave propagation
%T Investigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device
%L scholars5620
%D 2015