%J 2015 IEEE International Ultrasonics Symposium, IUS 2015 %R 10.1109/ULTSYM.2015.0362 %O cited By 4; Conference of IEEE International Ultrasonics Symposium, IUS 2015 ; Conference Date: 21 October 2015 Through 24 October 2015; Conference Code:118680 %A M.S. Pandian %A E. Marigo %A M. Shunmugam %A R.B. Hussain %A C.T.W. Song %A J.B.J. Din %A C.B. Fei %A V. Madhaven %A A.K. Kantimahanti %A A.F. Malik %A V. Jeoti %I Institute of Electrical and Electronics Engineers Inc. %X In this paper we present a study on the surface acoustic wave propagation performance and coupling coefficient for a non-planar thin film Surface Acoustic Wave device (SAW). Piezoelectric Aluminum Nitride (AlN) thin film is deposited on top of the Inter Digital Transducer (IDT) by a non conformal physical vapor deposition process. Non-planarity around the transducer impedes the wave propagation, this effect is investigated using SAW delay lines. © 2015 IEEE. %K Acoustic surface wave devices; Acoustic waves; Acoustics; Aluminum; Aluminum coatings; Aluminum nitride; Deposition; Nitrides; Physical vapor deposition; Piezoelectricity; Thin film devices; Thin films; Transducers; Ultrasonic transducers; Vapor deposition, Aluminum nitride (AlN); Coupling coefficient; Interdigital transducer; Physical vapor deposition process; Piezoelectric thin film devices; SAW delay line; Surface acoustic wave propagation; Thin film surfaces, Acoustic wave propagation %T Investigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device %L scholars5620 %D 2015