<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "Investigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device"^^ . "In this paper we present a study on the surface acoustic wave propagation performance and coupling coefficient for a non-planar thin film Surface Acoustic Wave device (SAW). Piezoelectric Aluminum Nitride (AlN) thin film is deposited on top of the Inter Digital Transducer (IDT) by a non conformal physical vapor deposition process. Non-planarity around the transducer impedes the wave propagation, this effect is investigated using SAW delay lines. © 2015 IEEE."^^ . "2015" . . . "Institute of Electrical and Electronics Engineers Inc."^^ . . "Institute of Electrical and Electronics Engineers Inc."^^ . . . "2015 IEEE International Ultrasonics Symposium, IUS 2015"^^ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . "V."^^ . "Jeoti"^^ . "V. Jeoti"^^ . . "J.B.J."^^ . "Din"^^ . "J.B.J. Din"^^ . . "E."^^ . "Marigo"^^ . "E. Marigo"^^ . . "C.T.W."^^ . "Song"^^ . "C.T.W. Song"^^ . . "M."^^ . "Shunmugam"^^ . "M. Shunmugam"^^ . . "A.K."^^ . "Kantimahanti"^^ . "A.K. Kantimahanti"^^ . . "C.B."^^ . "Fei"^^ . "C.B. Fei"^^ . . "R.B."^^ . "Hussain"^^ . "R.B. Hussain"^^ . . "V."^^ . "Madhaven"^^ . "V. Madhaven"^^ . . "A.F."^^ . "Malik"^^ . "A.F. Malik"^^ . . "M.S."^^ . "Pandian"^^ . "M.S. Pandian"^^ . . . . . "HTML Summary of #5620 \n\nInvestigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device\n\n" . "text/html" . .