%0 Conference Paper
%A Pandian, M.S.
%A Marigo, E.
%A Shunmugam, M.
%A Hussain, R.B.
%A Song, C.T.W.
%A Din, J.B.J.
%A Fei, C.B.
%A Madhaven, V.
%A Kantimahanti, A.K.
%A Malik, A.F.
%A Jeoti, V.
%D 2015
%F scholars:5620
%I Institute of Electrical and Electronics Engineers Inc.
%K Acoustic surface wave devices; Acoustic waves; Acoustics; Aluminum; Aluminum coatings; Aluminum nitride; Deposition; Nitrides; Physical vapor deposition; Piezoelectricity; Thin film devices; Thin films; Transducers; Ultrasonic transducers; Vapor deposition, Aluminum nitride (AlN); Coupling coefficient; Interdigital transducer; Physical vapor deposition process; Piezoelectric thin film devices; SAW delay line; Surface acoustic wave propagation; Thin film surfaces, Acoustic wave propagation
%R 10.1109/ULTSYM.2015.0362
%T Investigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device
%U https://khub.utp.edu.my/scholars/5620/
%X In this paper we present a study on the surface acoustic wave propagation performance and coupling coefficient for a non-planar thin film Surface Acoustic Wave device (SAW). Piezoelectric Aluminum Nitride (AlN) thin film is deposited on top of the Inter Digital Transducer (IDT) by a non conformal physical vapor deposition process. Non-planarity around the transducer impedes the wave propagation, this effect is investigated using SAW delay lines. © 2015 IEEE.
%Z cited By 4; Conference of IEEE International Ultrasonics Symposium, IUS 2015 ; Conference Date: 21 October 2015 Through 24 October 2015; Conference Code:118680