relation: https://khub.utp.edu.my/scholars/5620/
title: Investigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device
creator: Pandian, M.S.
creator: Marigo, E.
creator: Shunmugam, M.
creator: Hussain, R.B.
creator: Song, C.T.W.
creator: Din, J.B.J.
creator: Fei, C.B.
creator: Madhaven, V.
creator: Kantimahanti, A.K.
creator: Malik, A.F.
creator: Jeoti, V.
description: In this paper we present a study on the surface acoustic wave propagation performance and coupling coefficient for a non-planar thin film Surface Acoustic Wave device (SAW). Piezoelectric Aluminum Nitride (AlN) thin film is deposited on top of the Inter Digital Transducer (IDT) by a non conformal physical vapor deposition process. Non-planarity around the transducer impedes the wave propagation, this effect is investigated using SAW delay lines. © 2015 IEEE.
publisher: Institute of Electrical and Electronics Engineers Inc.
date: 2015
type: Conference or Workshop Item
type: PeerReviewed
identifier:   Pandian, M.S. and Marigo, E. and Shunmugam, M. and Hussain, R.B. and Song, C.T.W. and Din, J.B.J. and Fei, C.B. and Madhaven, V. and Kantimahanti, A.K. and Malik, A.F. and Jeoti, V.  (2015) Investigation on Surface Acoustic Wave propagation for a non-planar piezoelectric thin film device.  In: UNSPECIFIED.     
relation: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84962027616&doi=10.1109%2fULTSYM.2015.0362&partnerID=40&md5=83a99f813178e28a58277d041eee5a12
relation: 10.1109/ULTSYM.2015.0362
identifier: 10.1109/ULTSYM.2015.0362