?url_ver=Z39.88-2004&rft_id=10.1109%2FRSM.2015.7354957&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aulast=Gafare&rft.au=Gafare%2C+M.&rft.aufirst=M.&rft.date=2015&rft.isbn=9781479985500&rft.title=Modeling+and+simulation+of+polysilicon+piezoresistors+in+a+CMOS-MEMS+resonator+for+mass+detection&rft.genre=proceeding