eprintid: 5574
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/55/74
datestamp: 2023-11-09 16:17:19
lastmod: 2023-11-09 16:17:19
status_changed: 2023-11-09 16:03:13
type: conference_item
metadata_visibility: show
creators_name: Rahman, Z.H.A.
creators_name: Khir, M.H.Md.
creators_name: Burhanudin, Z.A.
title: CMOS-MEMS thermoelectric generator for low power medical devices
ispublished: pub
keywords: Biomedical equipment; Electric generators; Electronic equipment; Energy harvesting; Heat transfer; Nanoelectronics; Polysilicon; Thermocouples; Thermopiles, CMOS-MEMS; Design and simulation; Dielectric layer; Electrical energy; Output voltages; Temperature differences; Thermal insulators; Thermoelectric generators, Thermoelectric equipment
note: cited By 3; Conference of 10th IEEE Regional Symposium on Micro and Nano Electronics, RSM 2015 ; Conference Date: 19 August 2015 Through 21 August 2015; Conference Code:118464
abstract: This paper presents the design and simulation of a new concept of CMOS-MEMS thermoelectric generator (TEG) capable of converting thermal energy into electrical energy for use in low power medical devices. The TEG is designed with three unique features that will ensure optimum heat transfer that result in achievement of larger temperature difference between two junctions. First, a thicker dielectric layer is designed between two metal layers. Second, trenches isolation is introduced to isolate the hot and cold junction area. Third, thermal insulator and heat sink layer are deposited on the top surface of the TEG at the hot and cold junction area, respectively. Based on the simulation results of these three abovementioned features, a device with size of 25 mm2 consisting of 1712 thermocouples with 5 K temperature difference between two sides, is capable of producing output voltage and power of 3.294 V and 0.925 μW, respectively. Voltage factor is 2.635 Vcm-2K-1 and power factor is 0.148 μWcm-2K-2. © 2015 IEEE.
date: 2015
publisher: Institute of Electrical and Electronics Engineers Inc.
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84963891910&doi=10.1109%2fRSM.2015.7354965&partnerID=40&md5=5c20bb2c310a670f50238bfc779c280d
id_number: 10.1109/RSM.2015.7354965
full_text_status: none
publication: RSM 2015 - 2015 IEEE Regional Symposium on Micro and Nano Electronics, Proceedings
refereed: TRUE
isbn: 9781479985500
citation:   Rahman, Z.H.A. and Khir, M.H.Md. and Burhanudin, Z.A.  (2015) CMOS-MEMS thermoelectric generator for low power medical devices.  In: UNSPECIFIED.