TY  - JOUR
ID  - scholars4992
TI  - Testing of nickel-chrome alloy as a tip material for multi-tip langmuir probes
KW  - Electrons; Inductively coupled plasma; Langmuir probes; Nickel; Plasma theory; Probes; Electric discharges; Electrons; Inductively coupled plasma; Langmuir probes; Nickel; Nitrogen; Plasma theory; Probes; Radio waves
KW  -  Electron number densities; Inductively coupled plasma (ICP); Ion saturation current; Nitrogen gas pressure; Plasma characterization; Radio frequency plasma; Radio frequency source; Triple langmuir probes
KW  -  Electron temperature; Electron temperature
N1  - cited By 4
N2  - The electrostatic probes are considered to be the most powerful and experimentally simplest technique for plasma characterization. The objective of the work was to test the nickel-chrome alloy as probe tip material for characterization of RF discharge plasmas. In order to meet the objective, a triple Langmuir probe diagnostic system and associated driving circuit was designed and tested in inductively coupled plasma (ICP) generated by a 13.56 MHz radio frequency (RF) source. Using this probe diagnostic, the electron temperature, electron number density and ion saturation current were measured as a function of input RF power and filling gas pressure. An increasing trend was noticed in electron temperature and electron number density with input power whilst a decreasing trend was evident in these parameters for increasing nitrogen gas pressure. The overall variations in electron temperature and electron number density after repeated measurements were ranging from 5 to 12 and 3 to 13, respectively. © 2014 World Scientific Publishing Company.
IS  - 4
AV  - none
VL  - 21
JF  - Surface Review and Letters
A1  - Naz, M.Y.
A1  - Shukrullah, S.
A1  - Ghaffar, A.
A1  - Shakir, I.
A1  - Ullah, S.
A1  - Sagir, M.
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-84905818835&doi=10.1142%2fS0218625X14500565&partnerID=40&md5=5df55c57769f570601499aebe4ba1144
PB  - World Scientific Publishing Co. Pte Ltd
SN  - 0218625X
Y1  - 2014///
ER  -