%0 Journal Article
%@ 0218625X
%A Naz, M.Y.
%A Shukrullah, S.
%A Ghaffar, A.
%A Shakir, I.
%A Ullah, S.
%A Sagir, M.
%D 2014
%F scholars:4992
%I World Scientific Publishing Co. Pte Ltd
%J Surface Review and Letters
%K Electrons; Inductively coupled plasma; Langmuir probes; Nickel; Plasma theory; Probes; Electric discharges; Electrons; Inductively coupled plasma; Langmuir probes; Nickel; Nitrogen; Plasma theory; Probes; Radio waves, Electron number densities; Inductively coupled plasma (ICP); Ion saturation current; Nitrogen gas pressure; Plasma characterization; Radio frequency plasma; Radio frequency source; Triple langmuir probes, Electron temperature; Electron temperature
%N 4
%R 10.1142/S0218625X14500565
%T Testing of nickel-chrome alloy as a tip material for multi-tip langmuir probes
%U https://khub.utp.edu.my/scholars/4992/
%V 21
%X The electrostatic probes are considered to be the most powerful and experimentally simplest technique for plasma characterization. The objective of the work was to test the nickel-chrome alloy as probe tip material for characterization of RF discharge plasmas. In order to meet the objective, a triple Langmuir probe diagnostic system and associated driving circuit was designed and tested in inductively coupled plasma (ICP) generated by a 13.56 MHz radio frequency (RF) source. Using this probe diagnostic, the electron temperature, electron number density and ion saturation current were measured as a function of input RF power and filling gas pressure. An increasing trend was noticed in electron temperature and electron number density with input power whilst a decreasing trend was evident in these parameters for increasing nitrogen gas pressure. The overall variations in electron temperature and electron number density after repeated measurements were ranging from 5 to 12 and 3 to 13, respectively. © 2014 World Scientific Publishing Company.
%Z cited By 4