relation: https://khub.utp.edu.my/scholars/4992/
title: Testing of nickel-chrome alloy as a tip material for multi-tip langmuir probes
creator: Naz, M.Y.
creator: Shukrullah, S.
creator: Ghaffar, A.
creator: Shakir, I.
creator: Ullah, S.
creator: Sagir, M.
description: The electrostatic probes are considered to be the most powerful and experimentally simplest technique for plasma characterization. The objective of the work was to test the nickel-chrome alloy as probe tip material for characterization of RF discharge plasmas. In order to meet the objective, a triple Langmuir probe diagnostic system and associated driving circuit was designed and tested in inductively coupled plasma (ICP) generated by a 13.56 MHz radio frequency (RF) source. Using this probe diagnostic, the electron temperature, electron number density and ion saturation current were measured as a function of input RF power and filling gas pressure. An increasing trend was noticed in electron temperature and electron number density with input power whilst a decreasing trend was evident in these parameters for increasing nitrogen gas pressure. The overall variations in electron temperature and electron number density after repeated measurements were ranging from 5 to 12 and 3 to 13, respectively. © 2014 World Scientific Publishing Company.
publisher: World Scientific Publishing Co. Pte Ltd
date: 2014
type: Article
type: PeerReviewed
identifier:   Naz, M.Y. and Shukrullah, S. and Ghaffar, A. and Shakir, I. and Ullah, S. and Sagir, M.  (2014) Testing of nickel-chrome alloy as a tip material for multi-tip langmuir probes.  Surface Review and Letters, 21 (4).   ISSN 0218625X     
relation: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84905818835&doi=10.1142%2fS0218625X14500565&partnerID=40&md5=5df55c57769f570601499aebe4ba1144
relation: 10.1142/S0218625X14500565
identifier: 10.1142/S0218625X14500565