?url_ver=Z39.88-2004&rft_id=10.1109%2FICIAS.2014.6869462&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.au=Ahmed%2C+A.Y.&rft.aulast=Ahmed&rft.aufirst=A.Y.&rft.isbn=9781479946549&rft.title=Design+and+characterization+of+embedded+microheater+on+CMOS-MEMS+resonator+for+application+in+mass-sensitive+gas+sensors&rft.date=2014&rft.genre=proceeding