TY  - CONF
N2  - This paper presents new investigations to improve dynamic behavior of electrostatic cantilever based MEMS sensors by reducing pull-in voltage nonlinearity. It is believe that pull-in voltage is one of the major factors to generate pull-in force that induces parasitic pull-in frequency as a result the behavior of MEMS sensor become nonlinear. The dynamic behavior of the device is modeled under the pull-in force. The results of numerical simulation of nonlinear model show that pull-in nonlinear force participate to generate an opposite parasitic pull-in frequency. The effect of dielectric on pull-in force and pull-in frequency is analyzed by varying the thickness of dielectric layer at different applied. It is found that increasing the dielectric thickness reduces the pull-in nonlinear factors. Simulink tool is also used to model the schematic of complete electromechanical actuation and sensing of the device. The results show that output current of the device depends on the thickness of dielectric layer. © 2014 IEEE.
A1  - Shoaib, M.
A1  - Hamid, N.H.B.
A1  - Ali, N.B.B.Z.
A1  - Jan, M.T.
A1  - Mirza, A.
Y1  - 2014///
N1  - cited By 5; Conference of 2014 5th International Conference on Intelligent and Advanced Systems, ICIAS 2014 ; Conference Date: 3 June 2014 Through 5 June 2014; Conference Code:107042
TI  - Study of nonlinear pull-in voltage effects in electrostatic cantilever-based MEMS sensors
SN  - 9781479946549
CY  - Kuala Lumpur
PB  - IEEE Computer Society
AV  - none
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906335963&doi=10.1109%2fICIAS.2014.6869509&partnerID=40&md5=760fef66f6ed798fc2ac29fb391671f4
ID  - scholars4953
KW  - Dynamics; Electromechanical devices; MEMS; Models; Nanocantilevers
KW  -  cantilever; Dielectric layer; Dielectric thickness; Dynamic behaviors; Electro-mechanical actuations; Nonlinear factors; Pull-in voltage; Simulink
KW  -  Electrostatics
ER  -