?url_ver=Z39.88-2004&rft_id=10.1109%2FICIAS.2014.6869509&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.au=Shoaib%2C+M.&rft.aulast=Shoaib&rft.aufirst=M.&rft.title=Study+of+nonlinear+pull-in+voltage+effects+in+electrostatic+cantilever-based+MEMS+sensors&rft.isbn=9781479946549&rft.date=2014&rft.genre=proceeding