TY  - CONF
AV  - none
CY  - Kuala Lumpur
KW  - Acetone; Computer simulation; Medical applications; Resonators; Volatile organic compounds
KW  -  Biomedical applications; CMOS-MEMS; Concentration detections; Finite element method simulation; Mass detection; Microresnators; Natural resonance frequencies; Theoretical calculations
KW  -  Microelectromechanical devices
ID  - scholars4929
TI  - Design, modeling and simulation of CMOS-MEMS resonator for biomedical application
N1  - cited By 9; Conference of 2014 5th International Conference on Intelligent and Advanced Systems, ICIAS 2014 ; Conference Date: 3 June 2014 Through 5 June 2014; Conference Code:107042
N2  - CMOS-MEMS resonators have found a broad usage in mass sensing applications especially in biomedical field. This paper reports theoretical calculations and Finite Element Method (FEM) simulation for a proposed microresonator for detection of acetone in exhaled breath as biomarker for diabetes. The resonator is 760 μm long and 340 μm wide with 1.461ng effective mass, 21.331 kHz natural resonance frequency, and 8.867 mHz/pg mass sensitivity. Deposition of 4 μm sensitive layer gives 781 μHz/ppm gas concentration sensitivity with minimum concentration detection of 1.28 ppm. The operating voltage of this resonator is below 50 V and the static sensing capacitance is 90.84 fF. Due to the reasonable mass sensitivity of the resonator, it could be used for mass sensing applications. © 2014 IEEE.
SN  - 9781479946549
PB  - IEEE Computer Society
Y1  - 2014///
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906346379&doi=10.1109%2fICIAS.2014.6869455&partnerID=40&md5=6d57cdd807734a8a7e78f70ca82aaf69
A1  - Rabih, A.A.S.
A1  - Dennis, J.O.
A1  - Md Khir, M.H.
A1  - Abdullah, M.A.
ER  -