?url_ver=Z39.88-2004&rft_id=10.1109%2FICIAS.2014.6869455&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.au=Rabih%2C+A.A.S.&rft.aulast=Rabih&rft.aufirst=A.A.S.&rft.date=2014&rft.title=Design%2C+modeling+and+simulation+of+CMOS-MEMS+resonator+for+biomedical+application&rft.isbn=9781479946549&rft.genre=proceeding