@inproceedings{scholars4929,
       publisher = {IEEE Computer Society},
            note = {cited By 9; Conference of 2014 5th International Conference on Intelligent and Advanced Systems, ICIAS 2014 ; Conference Date: 3 June 2014 Through 5 June 2014; Conference Code:107042},
         address = {Kuala Lumpur},
             doi = {10.1109/ICIAS.2014.6869455},
         journal = {2014 5th International Conference on Intelligent and Advanced Systems: Technological Convergence for Sustainable Future, ICIAS 2014 - Proceedings},
            year = {2014},
           title = {Design, modeling and simulation of CMOS-MEMS resonator for biomedical application},
        abstract = {CMOS-MEMS resonators have found a broad usage in mass sensing applications especially in biomedical field. This paper reports theoretical calculations and Finite Element Method (FEM) simulation for a proposed microresonator for detection of acetone in exhaled breath as biomarker for diabetes. The resonator is 760 {\^I}1/4m long and 340 {\^I}1/4m wide with 1.461ng effective mass, 21.331 kHz natural resonance frequency, and 8.867 mHz/pg mass sensitivity. Deposition of 4 {\^I}1/4m sensitive layer gives 781 {\^I}1/4Hz/ppm gas concentration sensitivity with minimum concentration detection of 1.28 ppm. The operating voltage of this resonator is below 50 V and the static sensing capacitance is 90.84 fF. Due to the reasonable mass sensitivity of the resonator, it could be used for mass sensing applications. {\^A}{\copyright} 2014 IEEE.},
            isbn = {9781479946549},
             url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906346379&doi=10.1109\%2fICIAS.2014.6869455&partnerID=40&md5=6d57cdd807734a8a7e78f70ca82aaf69},
          author = {Rabih, A. A. S. and Dennis, J. O. and Md Khir, M. H. and Abdullah, M. A.},
        keywords = {Acetone; Computer simulation; Medical applications; Resonators; Volatile organic compounds, Biomedical applications; CMOS-MEMS; Concentration detections; Finite element method simulation; Mass detection; Microresnators; Natural resonance frequencies; Theoretical calculations, Microelectromechanical devices}
}