TY  - CONF
SN  - 9781479946549
ID  - scholars4906
TI  - Modeling and simulation of two modes of vibration in MEMS devices based on embedded piezoresistors
N1  - cited By 0; Conference of 2014 5th International Conference on Intelligent and Advanced Systems, ICIAS 2014 ; Conference Date: 3 June 2014 Through 5 June 2014; Conference Code:107042
CY  - Kuala Lumpur
Y1  - 2014///
AV  - none
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906351322&doi=10.1109%2fICIAS.2014.6869496&partnerID=40&md5=6b23613466ecde564ce882d7e0e27d84
KW  - Computer simulation; Electromechanical devices; MEMS; Resistors; Voltage dividers
KW  -  Fully differential; MEMSDevices; Micro electromechanical system (MEMS); Model and simulation; Piezoresistive effects; PZR; Transduction mechanism; Wheatstone bridges
KW  -  Bridge circuits
PB  - IEEE Computer Society
A1  - Ahmad, F.
A1  - Dennis, J.O.
A1  - Khir, M.H.B.M.
A1  - Bin Hamid, N.H.
A1  - Yar, A.
N2  - Piezoresistive effect is commonly used as transduction mechanism in microelectromechanical systems (MEMS) and Wheatstone bridge as readout circuit. This paper presents modeling and simulation of two modes of vibration in the MEMS device through embedded piezoresistors which are arranged in Wheatstone bridge configuration, modeling is extended up to n branches for wide range of applications in MEMS. The comparative analysis of fully and half differential setups even with one variable resistor with balanced form of the two branch bridge is modeled as well as simulated using Multisim8. The sensitivity of the bridge in fully, half and with one variable resistor configuration is found to be 2 μV/mΩ, 1 μV/mΩ and 0.49 μV/mΩ respectively. It is found that fully differential set up is the most sensitive one. This output is amplifiable by using 1000 gain amplifier. © 2014 IEEE.
ER  -