?url_ver=Z39.88-2004&rft_id=10.1109%2FICIAS.2014.6869496&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aulast=Ahmad&rft.au=Ahmad%2C+F.&rft.aufirst=F.&rft.isbn=9781479946549&rft.date=2014&rft.title=Modeling+and+simulation+of+two+modes+of+vibration+in+MEMS+devices+based+on+embedded+piezoresistors&rft.genre=proceeding