%T Surface Morphology and Nanoindentation of Low Temperature Hybrid Treated of AISI 316L %A A. Triwiyanto %A P. Husain %A S. Anggraeni %A M. Ismail %I Springer Science and Business Media B.V. %P 93-103 %X This chapter measures surface mechanical properties of hybrid-treated layers at low temperature using nanoindentation method. The tools to characterize the treated layers including its roughness were performed by FESEM (Field Emission Scanning Electron Microscope) and USPM (Universal Scanning Probe Microscope). These hybrid-treated samples have shown an increase in hardness and elastic modulus compared to the untreated sample. Moreover, all treated samples have improvement on E/H ratio which shows a decrement to plastic deformation and degrade the disparity of properties, while maintaining the elastic range of deformation. © 2014, Springer International Publishing Switzerland. %K Aluminum nitride; Austenitic stainless steel; Nanoindentation; Nitrogen plasma; Plasma applications; Scanning electron microscopy; Temperature, 316L; Field emission scanning electron microscopes; Lows-temperatures; Nano indentation; Nano-indentation methods; Nanoindentation tests; Nitrided layer; Plasma nitriding; Scanning probes; Surface mechanical properties, Chromium compounds %D 2014 %R 10.1007/978-3-319-04516-0₈ %O cited By 0 %J Engineering Materials %L scholars4461