TY - JOUR N2 - This chapter measures surface mechanical properties of hybrid-treated layers at low temperature using nanoindentation method. The tools to characterize the treated layers including its roughness were performed by FESEM (Field Emission Scanning Electron Microscope) and USPM (Universal Scanning Probe Microscope). These hybrid-treated samples have shown an increase in hardness and elastic modulus compared to the untreated sample. Moreover, all treated samples have improvement on E/H ratio which shows a decrement to plastic deformation and degrade the disparity of properties, while maintaining the elastic range of deformation. © 2014, Springer International Publishing Switzerland. N1 - cited By 0 ID - scholars4461 TI - Surface Morphology and Nanoindentation of Low Temperature Hybrid Treated of AISI 316L SP - 93 KW - Aluminum nitride; Austenitic stainless steel; Nanoindentation; Nitrogen plasma; Plasma applications; Scanning electron microscopy; Temperature KW - 316L; Field emission scanning electron microscopes; Lows-temperatures; Nano indentation; Nano-indentation methods; Nanoindentation tests; Nitrided layer; Plasma nitriding; Scanning probes; Surface mechanical properties KW - Chromium compounds AV - none JF - Engineering Materials A1 - Triwiyanto, A. A1 - Husain, P. A1 - Anggraeni, S. A1 - Ismail, M. UR - https://www.scopus.com/inward/record.uri?eid=2-s2.0-85126687555&doi=10.1007%2f978-3-319-04516-0_8&partnerID=40&md5=1f0c88dd6b418961acceddd60be5350e EP - 103 Y1 - 2014/// PB - Springer Science and Business Media B.V. SN - 16121317 ER -