eprintid: 4394
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/43/94
datestamp: 2023-11-09 16:16:04
lastmod: 2023-11-09 16:16:04
status_changed: 2023-11-09 15:58:20
type: article
metadata_visibility: show
creators_name: Tariq Jan, M.
creators_name: Hisham Bin Hamid, N.
creators_name: Md Khir, M.H.
creators_name: Ashraf, K.
creators_name: Shoaib, M.
title: Reliability and fatigue analysis in cantilever-based MEMS devices operating in harsh environments
ispublished: pub
note: cited By 19
abstract: The microelectromechanical system (MEMS) is one of the most diversified fields of microelectronics; it is rated to be the most promising technology of modern engineering. MEMS can sense, actuate, and integrate mechanical and electromechanical components of micro- and nano sizes on a single silicon substrate using microfabrication techniques. MEMS industry is at the verge of transforming the semiconductor world into MEMS universe, apart from other hindrances; the reliability of these devices is the focal point of recent research. Commercialization is highly dependent on the reliability of these devices. MEMS requires a high level of reliability. Several technological factors, operating conditions, and environmental effects influencing the performances of MEMS devices must be completely understood. This study reviews some of the major reliability issues and failure mechanisms. Specifically, the fatigue in MEMS is a major material reliability issue resulting in structural damage, crack growth, and lifetime measurements of MEMS devices in the light of statistical distribution and fatigue implementation of Paris' law for fatigue crack accumulation under the influence of undesirable operating and environmental conditions. © 2014 Mohammad Tariq Jan et al.
date: 2014
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893651288&doi=10.1155%2f2014%2f987847&partnerID=40&md5=b14ade815353443a2082d5388ab7dd5f
id_number: 10.1155/2014/987847
full_text_status: none
publication: Journal of Quality and Reliability Engineering
volume: 2014
refereed: TRUE
issn: 23148055
citation:   Tariq Jan, M. and Hisham Bin Hamid, N. and Md Khir, M.H. and Ashraf, K. and Shoaib, M.  (2014) Reliability and fatigue analysis in cantilever-based MEMS devices operating in harsh environments.  Journal of Quality and Reliability Engineering, 2014.   ISSN 23148055