eprintid: 4308
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/43/08
datestamp: 2023-11-09 16:15:59
lastmod: 2023-11-09 16:15:59
status_changed: 2023-11-09 15:58:09
type: article
metadata_visibility: show
creators_name: Mirza, A.
creators_name: Hamid, N.H.
creators_name: Khir, M.H.M.
creators_name: Dennis, J.O.
creators_name: Ashraf, K.
creators_name: Shoaib, M.
creators_name: Jan, M.T.
title: A CMOS-MEMS cantilever sensor for capnometric applications
ispublished: pub
keywords: Artificial life; Carbon dioxide; Chemical sensors, Capnometers; CMOS-MEMS; CO2 sensor; Exhaled breaths; High costs; High power consumption; Micro-cantilevers; Quality factors, CMOS integrated circuits
note: cited By 4
abstract: Capnometers monitor the concentration of CO2 in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO2 sensor is proposed for capnometric applications. The microcantilever is manufactured using CMOS MEMS technology and its critical parameters are analytically investigated. The optimized microcantilever has a quality factor, sensitivity and resolution of 3116, 16 mHz/ppm and 0.31 ppb, respectively. © IEICE 2014.
date: 2014
publisher: Institute of Electronics Information Communication Engineers
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84900521628&doi=10.1587%2felex.11.20140113&partnerID=40&md5=bf18bd760b5b4d250ad477294ce20469
id_number: 10.1587/elex.11.20140113
full_text_status: none
publication: IEICE Electronics Express
volume: 11
number: 9
refereed: TRUE
issn: 13492543
citation:   Mirza, A. and Hamid, N.H. and Khir, M.H.M. and Dennis, J.O. and Ashraf, K. and Shoaib, M. and Jan, M.T.  (2014) A CMOS-MEMS cantilever sensor for capnometric applications.  IEICE Electronics Express, 11 (9).   ISSN 13492543