%K Artificial life; Carbon dioxide; Chemical sensors, Capnometers; CMOS-MEMS; CO2 sensor; Exhaled breaths; High costs; High power consumption; Micro-cantilevers; Quality factors, CMOS integrated circuits
%X Capnometers monitor the concentration of CO2 in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO2 sensor is proposed for capnometric applications. The microcantilever is manufactured using CMOS MEMS technology and its critical parameters are analytically investigated. The optimized microcantilever has a quality factor, sensitivity and resolution of 3116, 16 mHz/ppm and 0.31 ppb, respectively. © IEICE 2014.
%J IEICE Electronics Express
%L scholars4308
%O cited By 4
%R 10.1587/elex.11.20140113
%N 9
%D 2014
%I Institute of Electronics Information Communication Engineers
%V 11
%A A. Mirza
%A N.H. Hamid
%A M.H.M. Khir
%A J.O. Dennis
%A K. Ashraf
%A M. Shoaib
%A M.T. Jan
%T A CMOS-MEMS cantilever sensor for capnometric applications