TY  - JOUR
AV  - none
KW  - Artificial life; Carbon dioxide; Chemical sensors
KW  -  Capnometers; CMOS-MEMS; CO2 sensor; Exhaled breaths; High costs; High power consumption; Micro-cantilevers; Quality factors
KW  -  CMOS integrated circuits
TI  - A CMOS-MEMS cantilever sensor for capnometric applications
ID  - scholars4308
N2  - Capnometers monitor the concentration of CO2 in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO2 sensor is proposed for capnometric applications. The microcantilever is manufactured using CMOS MEMS technology and its critical parameters are analytically investigated. The optimized microcantilever has a quality factor, sensitivity and resolution of 3116, 16 mHz/ppm and 0.31 ppb, respectively. © IEICE 2014.
IS  - 9
N1  - cited By 4
SN  - 13492543
PB  - Institute of Electronics Information Communication Engineers
Y1  - 2014///
VL  - 11
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-84900521628&doi=10.1587%2felex.11.20140113&partnerID=40&md5=bf18bd760b5b4d250ad477294ce20469
JF  - IEICE Electronics Express
A1  - Mirza, A.
A1  - Hamid, N.H.
A1  - Khir, M.H.M.
A1  - Dennis, J.O.
A1  - Ashraf, K.
A1  - Shoaib, M.
A1  - Jan, M.T.
ER  -