<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "A CMOS-MEMS cantilever sensor for capnometric applications"^^ . "Capnometers monitor the concentration of CO2 in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO2 sensor is proposed for capnometric applications. The microcantilever is manufactured using CMOS MEMS technology and its critical parameters are analytically investigated. The optimized microcantilever has a quality factor, sensitivity and resolution of 3116, 16 mHz/ppm and 0.31 ppb, respectively. © IEICE 2014."^^ . "2014" . . "11" . "9" . . "Institute of Electronics Information Communication Engineers"^^ . . . "IEICE Electronics Express"^^ . . . "13492543" . . . . . . . . . . . . . . . . . . . . . . . . . "M."^^ . "Shoaib"^^ . "M. Shoaib"^^ . . "M.T."^^ . "Jan"^^ . "M.T. Jan"^^ . . "N.H."^^ . "Hamid"^^ . "N.H. Hamid"^^ . . "A."^^ . "Mirza"^^ . "A. Mirza"^^ . . "K."^^ . "Ashraf"^^ . "K. Ashraf"^^ . . "M.H.M."^^ . "Khir"^^ . "M.H.M. Khir"^^ . . "J.O."^^ . "Dennis"^^ . "J.O. Dennis"^^ . . . . . "HTML Summary of #4308 \n\nA CMOS-MEMS cantilever sensor for capnometric applications\n\n" . "text/html" . .