relation: https://khub.utp.edu.my/scholars/4308/
title: A CMOS-MEMS cantilever sensor for capnometric applications
creator: Mirza, A.
creator: Hamid, N.H.
creator: Khir, M.H.M.
creator: Dennis, J.O.
creator: Ashraf, K.
creator: Shoaib, M.
creator: Jan, M.T.
description: Capnometers monitor the concentration of CO2 in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO2 sensor is proposed for capnometric applications. The microcantilever is manufactured using CMOS MEMS technology and its critical parameters are analytically investigated. The optimized microcantilever has a quality factor, sensitivity and resolution of 3116, 16 mHz/ppm and 0.31 ppb, respectively. © IEICE 2014.
publisher: Institute of Electronics Information Communication Engineers
date: 2014
type: Article
type: PeerReviewed
identifier:   Mirza, A. and Hamid, N.H. and Khir, M.H.M. and Dennis, J.O. and Ashraf, K. and Shoaib, M. and Jan, M.T.  (2014) A CMOS-MEMS cantilever sensor for capnometric applications.  IEICE Electronics Express, 11 (9).   ISSN 13492543     
relation: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84900521628&doi=10.1587%2felex.11.20140113&partnerID=40&md5=bf18bd760b5b4d250ad477294ce20469
relation: 10.1587/elex.11.20140113
identifier: 10.1587/elex.11.20140113