?url_ver=Z39.88-2004&rft_id=10.1587%2Felex.11.20140113&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.aufirst=A.&rft.au=Mirza%2C+A.&rft.aulast=Mirza&rft.date=2014&rft.title=IEICE+Electronics+Express&rft.atitle=A+CMOS-MEMS+cantilever+sensor+for+capnometric+applications&rft.issue=9&rft.volume=11&rft.issn=13492543&rft.genre=article