@article{scholars4308,
         journal = {IEICE Electronics Express},
       publisher = {Institute of Electronics Information Communication Engineers},
            year = {2014},
           title = {A CMOS-MEMS cantilever sensor for capnometric applications},
             doi = {10.1587/elex.11.20140113},
          number = {9},
            note = {cited By 4},
          volume = {11},
        abstract = {Capnometers monitor the concentration of CO2 in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO2 sensor is proposed for capnometric applications. The microcantilever is manufactured using CMOS MEMS technology and its critical parameters are analytically investigated. The optimized microcantilever has a quality factor, sensitivity and resolution of 3116, 16 mHz/ppm and 0.31 ppb, respectively. {\^A}{\copyright} IEICE 2014.},
             url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-84900521628&doi=10.1587\%2felex.11.20140113&partnerID=40&md5=bf18bd760b5b4d250ad477294ce20469},
        keywords = {Artificial life; Carbon dioxide; Chemical sensors, Capnometers; CMOS-MEMS; CO2 sensor; Exhaled breaths; High costs; High power consumption; Micro-cantilevers; Quality factors, CMOS integrated circuits},
          author = {Mirza, A. and Hamid, N. H. and Khir, M. H. M. and Dennis, J. O. and Ashraf, K. and Shoaib, M. and Jan, M. T.},
            issn = {13492543}
}