eprintid: 379
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/03/79
datestamp: 2023-11-09 15:16:00
lastmod: 2023-11-09 15:16:00
status_changed: 2023-11-09 15:14:26
type: conference_item
metadata_visibility: show
creators_name: Ahmed, A.Y.
creators_name: Dennis, J.O.
creators_name: Saad, M.N.M.
creators_name: Talah, W.A.
title: Design and simulation of a high temperature MEMS microhotplate for application in trace gas detection
ispublished: pub
keywords: CoventorWare; Design and simulation; High temperature MEMS; Insulating layers; Mechanical deflection; Membrane layers; Micro hotplate; Microhotplates; Power Consumption; Simulation result; Thermo-mechanical behaviors; Trace gas detection, Electric power utilization; Membranes; MEMS; Microelectromechanical devices; Silicon carbide; Silicon nitride, Silicon oxides
note: cited By 10; Conference of 2008 IEEE International Conference on Semiconductor Electronics, ICSE 2008 ; Conference Date: 25 November 2008 Through 27 November 2008; Conference Code:76092
abstract: In this paper, we present the simulation results of a high temperature MEMS micro-hotplate. The electro-thermomechanical behaviors of micro- hotplates (MHP) have been simulated using CoventorWare. In the simulation, the effects of various thicknesses of the silicon nitride (Si3N4) membrane layer on the temperature, mechanical deflection and power consumption of the MHP are evaluated. The effect of the addition of a layer of silicon carbide (SiC) on the MHP temperature distribution is also investigated. Results show that as the thickness of the Si3N4 membrane is increased from 0.3 μm to 3 μm, the power consumption of the MHP increases from 7.1mW to 34.3mW while the displacement of the membrane remains constant at a value of about 5.8 μm. It is also demonstrated that when the MHP is designed with a silicon carbide (SiC) heat distributing layer above the silicon oxide (SiO2) insulating layer on top of the heater, the uniformity of the temperature on the MHP membrane is considerably improved as compared to a membrane without SiC. ©2008 IEEE.
date: 2008
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-65949104823&doi=10.1109%2fSMELEC.2008.4770297&partnerID=40&md5=54d948fc977bba8a32425ad0b75b6473
id_number: 10.1109/SMELEC.2008.4770297
full_text_status: none
publication: IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
place_of_pub: Johor Bahru, Johor
pagerange: 153-157
refereed: TRUE
isbn: 9781424425617
citation:   Ahmed, A.Y. and Dennis, J.O. and Saad, M.N.M. and Talah, W.A.  (2008) Design and simulation of a high temperature MEMS microhotplate for application in trace gas detection.  In: UNSPECIFIED.