?url_ver=Z39.88-2004&rft_id=10.1109%2FSAS.2013.6493573&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aulast=Ojur+Dennis&rft.au=Ojur+Dennis%2C+J.&rft.aufirst=J.&rft.isbn=9781467346351&rft.title=Analysis+of+bonding+failure+in+CMOS+MEMS+chips&rft.date=2013&rft.genre=proceeding