eprintid: 3305
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/33/05
datestamp: 2023-11-09 15:51:34
lastmod: 2023-11-09 15:51:34
status_changed: 2023-11-09 15:46:32
type: conference_item
metadata_visibility: show
creators_name: Ahmad, M.R.
creators_name: Khir, M.H.M.
creators_name: Dennis, J.O.
title: Fabrication of the Trapezoidal electrodes and Electrets material for electrostatic energy harvester
ispublished: pub
keywords: Aluminum electrodes; Corona; Electrical energy; Electrostatic energies; Fabrication process; Harvesting methods; MEMS (microelectro-mechanical-system); Trapezoidal electrodes, CMOS integrated circuits; Electrodes; Electrostatics; Energy harvesting; Fabrication; MEMS; Serpentine; Silicon oxides; Silicon wafers, Electrets
note: cited By 0; Conference of 2013 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2013 ; Conference Date: 25 September 2013 Through 27 September 2013; Conference Code:102452
abstract: Conversion of the mechanical vibration into electrical energy has been found feasible with MEMS (Micro-Electro-Mechanical-System) electrostatic energy harvesting method. The electrostatic energy harvesting device is fabricated on a silicon wafer for use on miniaturize applications. This paper presents the detail fabrication processes of the electrostatic energy harvester components, i.e. the Trapezoidal electrodes and Electrets. The trapezoidal electrodes structure comprises of the seismic mass, serpentine beams and Aluminum electrodes whereas the electrets is made up of Silicon Dioxides (SiO 2). The energy harvester components are designed with Cadence Virtuoso software and later fabricated at the wafer foundry leveraging the 0.35 μm CMOS processes on 200 mm silicon wafers. The trapezoidal electrodes and electrets fabrications went through seven and two masking steps respectively. Performance of the electrets material are evaluated with Corona charging method. Characterization results show that the CVD oxide exhibits good charge retention capability, hence is recommended for application as electrets material on the vibration-based electrostatic energy harvester. © 2013 IEEE.
date: 2013
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84893553117&doi=10.1109%2fRSM.2013.6706459&partnerID=40&md5=012573835d07ee3f45b15162f6691def
id_number: 10.1109/RSM.2013.6706459
full_text_status: none
publication: Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics
place_of_pub: Langkawi
pagerange: 5-8
refereed: TRUE
isbn: 9781479911837
citation:   Ahmad, M.R. and Khir, M.H.M. and Dennis, J.O.  (2013) Fabrication of the Trapezoidal electrodes and Electrets material for electrostatic energy harvester.  In: UNSPECIFIED.