%0 Conference Paper
%A Mirza, A.
%A Hamid, N.H.
%A Khir, M.H.M.
%A Dennis, J.O.
%A Ashraf, K.
%A Jan, M.T.
%A Shoaib, M.
%D 2013
%F scholars:3301
%K CO2 sensor; Exhaled breaths; Micro cantilever sensors; Micro-cantilevers; Model and simulation; Polymer Coating; Polymer layers; Resonance frequencies, Analytical models; Carbon dioxide; Computer simulation; Medical applications; Nanocantilevers; Natural frequencies, Sensors
%P 70-73
%R 10.1109/RSM.2013.6706475
%T Analytical modeling and simulation of a CMOS-MEMS cantilever based CO2 sensor for medical applications
%U https://khub.utp.edu.my/scholars/3301/
%X Capnometers measure the concentration of CO2 in exhaled breath which could prevent serious problems in all areas of healthcare, from pre-hospital to extended care, and everywhere in between. Presently, high cost, big size and high power usage limit the scope of the conventional capnometers and their adaption. To overcome these issues, a CMOS MEMS micro-cantilever has been proposed for capnometric applications. Analytical modeling and simulation of the microcantilever sensor is carried out to determine its resonance frequency and sensitivity. According to the developed analytical model and simulation results, the sensor has 1 difference in the resonance frequency. The sensitivity of the sensor is determined analytically at different thicknesses of the polymer coating layer. The sensitivity of the sensor is 3.18 Hz/100ppm at 5 μm polymer layer thickness. © 2013 IEEE.
%Z cited By 4; Conference of 2013 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2013 ; Conference Date: 25 September 2013 Through 27 September 2013; Conference Code:102452