?url_ver=Z39.88-2004&rft_id=10.1109%2FRSM.2013.6706475&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aulast=Mirza&rft.au=Mirza%2C+A.&rft.aufirst=A.&rft.isbn=9781479911837&rft.date=2013&rft.title=Analytical+modeling+and+simulation+of+a+CMOS-MEMS+cantilever+based+CO2+sensor+for+medical+applications&rft.genre=proceeding