eprintid: 3220
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/32/20
datestamp: 2023-11-09 15:51:29
lastmod: 2023-11-09 15:51:29
status_changed: 2023-11-09 15:45:15
type: article
metadata_visibility: show
creators_name: Mirza, A.
creators_name: Hamid, N.H.
creators_name: Md Khir, M.H.
creators_name: Ashraf, K.
creators_name: Jan, M.T.
creators_name: Riaz, K.
title: Design, modeling and simulation of CMOS-MEMS piezoresistive cantilever based carbon dioxide gas sensor for capnometry
ispublished: pub
keywords: Biological sensors; Capnometry; Carbon dioxide gas sensor; Clinical use; CMOS; CMOS technology; CMOS-MEMS; CoventorWare; Developed model; Dynamic modes; Fully differential; High costs; High power consumption; Human breath; Large sizes; Low costs; Low Power; Mass sensitivity; MEMS-based sensors; Modeling and simulation; Piezo-resistive; Piezo-resistive cantilevers; Piezoresistive sensing; Resonant sensors; Simulation software; Small size, Atmospheric composition; Biosensors; Carbon; Carbon dioxide; Chemical sensors; CMOS integrated circuits; Computer software; MATLAB; MEMS; Natural frequencies; Resonators, Computer simulation
note: cited By 5; Conference of 2011 7th International Conference on MEMS, NANO and Smart Systems, ICMENS 2011 ; Conference Date: 4 November 2011 Through 6 November 2011; Conference Code:87709
abstract: This paper reports design, modeling and simulation of MEMS based sensor working in dynamic mode with fully differential piezoresistive sensing for monitoring the concentration of exhaled carbon dioxide (CO2) gas in human breath called capnometer. CO2 being a very important biomarker, it is desirable to extend the scope of its monitoring beyond clinical use to home and ambulatory services. Currently the scope of capnometers and its adaption is limited by high cost, large size and high power consumption of conventional capnometers. In recent years, MEMS based micro resonant sensors have received considerable attention due to their potential as a platform for the development of many novel physical, chemical, and biological sensors with small size, low cost and low power requirements. The sensor is designed using 0.35 micron CMOS technology. CoventorWare and MATLAB have been used as simulation software. According to the developed model and simulation results the resonator has resonant frequency 57393 Hz and mass sensitivity of 3.2 Hz/ng. The results show that the longitudinal relative change of resistance is 0.24/μm while the transverse relative change of resistance is -0.03/μm. © (2012) Trans Tech Publications, Switzerland.
date: 2012
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-83255170641&doi=10.4028%2fwww.scientific.net%2fAMR.403-408.3769&partnerID=40&md5=fe57d529effeae5389e19a67721719df
id_number: 10.4028/www.scientific.net/AMR.403-408.3769
full_text_status: none
publication: Advanced Materials Research
volume: 403-40
place_of_pub: Kuala Lumpur
pagerange: 3769-3774
refereed: TRUE
isbn: 9783037853122
issn: 10226680
citation:   Mirza, A. and Hamid, N.H. and Md Khir, M.H. and Ashraf, K. and Jan, M.T. and Riaz, K.  (2012) Design, modeling and simulation of CMOS-MEMS piezoresistive cantilever based carbon dioxide gas sensor for capnometry.  Advanced Materials Research, 403-40.  pp. 3769-3774.  ISSN 10226680