?url_ver=Z39.88-2004&rft_id=10.1049%2Fmnl.2011.0658&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=Rouhi%2C+J.&rft.aulast=Rouhi&rft.aufirst=J.&rft.date=2012&rft.title=Micro+and+Nano+Letters&rft.atitle=Optimisation+of+nanooxide+mask+fabricated+by+atomic+force+microscopy+nanolithography%3A+A+response+surface+methodology+application&rft.pages=325-328&rft.volume=7&rft.issn=17500443&rft.issue=4&rft.genre=article