relation: https://khub.utp.edu.my/scholars/2722/
title: Modeling and microfabrication of a CMOS resonator for magnetic field measurement
creator: Ahmad, F.
creator: Dennis, J.O.
creator: Khir, M.H.M.
creator: Hamid, N.H.
description: This paper presents the modeling and microfabrication of a CMOS resonant magnetic field sensor capable of measuring magnetic field in the range of nanotesla. This sensor is based on differential electrostatic along with Lorentz force actuation and piezoresistive sensing. Cadence virtuoso layout is used to design the resonant magnetic sensor for fabrication. Using microfabrication facilities of MIMOS Bhd all CMOS layers i.e. three metal and two poly layers are used to fabricate the magnetic sensor to enhance the sensitivity. At sensor output, without any amplification its sensitivity is 1.4807 μV/μT at 0.001 damping ratio with quality factor 500 and resonant frequency 9.35 kHz. © 2011 IEEE.
date: 2012
type: Conference or Workshop Item
type: PeerReviewed
identifier:   Ahmad, F. and Dennis, J.O. and Khir, M.H.M. and Hamid, N.H.  (2012) Modeling and microfabrication of a CMOS resonator for magnetic field measurement.  In: UNSPECIFIED.     
relation: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84867958546&doi=10.1109%2fICIAS.2012.6306104&partnerID=40&md5=c70621a0000943334c918c55c8e4f73f
relation: 10.1109/ICIAS.2012.6306104
identifier: 10.1109/ICIAS.2012.6306104