?url_ver=Z39.88-2004&rft_id=10.1109%2FICIAS.2012.6306127&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aufirst=A.&rft.aulast=Mirza&rft.au=Mirza%2C+A.&rft.title=Post-CMOS+processing+and+DC+characterization+of+a+resonant+microcantilever+for+gas+sensing&rft.isbn=9781457719677&rft.date=2012&rft.genre=proceeding