eprintid: 2699
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/26/99
datestamp: 2023-11-09 15:50:56
lastmod: 2023-11-09 15:50:56
status_changed: 2023-11-09 15:44:05
type: conference_item
metadata_visibility: show
creators_name: Ahmed, A.Y.
creators_name: Dennis, J.O.
creators_name: Khir, M.H.M.
creators_name: Saad, M.N.M.
title: Finite element analysis of a mass-sensitive CMOS-MEMS resonator using CoventorWare simulation software
ispublished: pub
keywords: Active material; Analyte molecules; CMOS-MEMS; CoventorWare; Gas sensing; Gaseous species; Micro resonators; Micromachined; Simulation software; Z-directions, Finite element method; Microelectromechanical devices; Natural frequencies; Resonators, Computer software
note: cited By 1; Conference of 2012 4th International Conference on Intelligent and Advanced Systems, ICIAS 2012 ; Conference Date: 12 June 2012 Through 14 June 2012; Conference Code:93534
abstract: The finite element analysis of a mass-sensitive CMOS-MEMS resonator using architect is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the absorption/adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. CoventorWare simulation software is used to design and simulate the micromachined resonator gas sensing platform/membrane. From simulation, the resonant frequency of the resonator is found to be 6.45 kHz and 23 kHz for mode 1 and mode 2 (in y and z direction), respectively. The frequency increases with decrease in the length of the beam. On the other hand the frequency decreases with increasing mass on the top of the CMOS-MEMS resonator. The sensitivity is determined to be 0.18 Hz/pg. © 2011 IEEE.
date: 2012
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84867976711&doi=10.1109%2fICIAS.2012.6306119&partnerID=40&md5=6cdeb1aeca93549a07eae066e0f778d5
id_number: 10.1109/ICIAS.2012.6306119
full_text_status: none
publication: ICIAS 2012 - 2012 4th International Conference on Intelligent and Advanced Systems: A Conference of World Engineering, Science and Technology Congress (ESTCON) - Conference Proceedings
volume: 2
place_of_pub: Kuala Lumpur
pagerange: 780-783
refereed: TRUE
isbn: 9781457719677
citation:   Ahmed, A.Y. and Dennis, J.O. and Khir, M.H.M. and Saad, M.N.M.  (2012) Finite element analysis of a mass-sensitive CMOS-MEMS resonator using CoventorWare simulation software.  In: UNSPECIFIED.