%A A.Y. Ahmed
%A J.O. Dennis
%A M.H.M. Khir
%A M.N.M. Saad
%D 2012
%K Active material; Analyte molecules; CMOS-MEMS; CoventorWare; Gas sensing; Gaseous species; Micro resonators; Micromachined; Simulation software; Z-directions, Finite element method; Microelectromechanical devices; Natural frequencies; Resonators, Computer software
%L scholars2699
%O cited By 1; Conference of 2012 4th International Conference on Intelligent and Advanced Systems, ICIAS 2012 ; Conference Date: 12 June 2012 Through 14 June 2012; Conference Code:93534
%C Kuala Lumpur
%X The finite element analysis of a mass-sensitive CMOS-MEMS resonator using architect is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the absorption/adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. CoventorWare simulation software is used to design and simulate the micromachined resonator gas sensing platform/membrane. From simulation, the resonant frequency of the resonator is found to be 6.45 kHz and 23 kHz for mode 1 and mode 2 (in y and z direction), respectively. The frequency increases with decrease in the length of the beam. On the other hand the frequency decreases with increasing mass on the top of the CMOS-MEMS resonator. The sensitivity is determined to be 0.18 Hz/pg. © 2011 IEEE.
%J ICIAS 2012 - 2012 4th International Conference on Intelligent and Advanced Systems: A Conference of World Engineering, Science and Technology Congress (ESTCON) - Conference Proceedings
%T Finite element analysis of a mass-sensitive CMOS-MEMS resonator using CoventorWare simulation software
%R 10.1109/ICIAS.2012.6306119
%V 2
%P 780-783