TY  - CONF
SN  - 9781457719677
Y1  - 2012///
EP  - 783
VL  - 2
A1  - Ahmed, A.Y.
A1  - Dennis, J.O.
A1  - Khir, M.H.M.
A1  - Saad, M.N.M.
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-84867976711&doi=10.1109%2fICIAS.2012.6306119&partnerID=40&md5=6cdeb1aeca93549a07eae066e0f778d5
AV  - none
CY  - Kuala Lumpur
TI  - Finite element analysis of a mass-sensitive CMOS-MEMS resonator using CoventorWare simulation software
ID  - scholars2699
SP  - 780
KW  - Active material; Analyte molecules; CMOS-MEMS; CoventorWare; Gas sensing; Gaseous species; Micro resonators; Micromachined; Simulation software; Z-directions
KW  -  Finite element method; Microelectromechanical devices; Natural frequencies; Resonators
KW  -  Computer software
N2  - The finite element analysis of a mass-sensitive CMOS-MEMS resonator using architect is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the absorption/adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. CoventorWare simulation software is used to design and simulate the micromachined resonator gas sensing platform/membrane. From simulation, the resonant frequency of the resonator is found to be 6.45 kHz and 23 kHz for mode 1 and mode 2 (in y and z direction), respectively. The frequency increases with decrease in the length of the beam. On the other hand the frequency decreases with increasing mass on the top of the CMOS-MEMS resonator. The sensitivity is determined to be 0.18 Hz/pg. © 2011 IEEE.
N1  - cited By 1; Conference of 2012 4th International Conference on Intelligent and Advanced Systems, ICIAS 2012 ; Conference Date: 12 June 2012 Through 14 June 2012; Conference Code:93534
ER  -