<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "Finite element analysis of a mass-sensitive CMOS-MEMS resonator using CoventorWare simulation software"^^ . "The finite element analysis of a mass-sensitive CMOS-MEMS resonator using architect is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the absorption/adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. CoventorWare simulation software is used to design and simulate the micromachined resonator gas sensing platform/membrane. From simulation, the resonant frequency of the resonator is found to be 6.45 kHz and 23 kHz for mode 1 and mode 2 (in y and z direction), respectively. The frequency increases with decrease in the length of the beam. On the other hand the frequency decreases with increasing mass on the top of the CMOS-MEMS resonator. The sensitivity is determined to be 0.18 Hz/pg. © 2011 IEEE."^^ . "2012" . . "2" . . "ICIAS 2012 - 2012 4th International Conference on Intelligent and Advanced Systems: A Conference of World Engineering, Science and Technology Congress (ESTCON) - Conference Proceedings"^^ . . . . . . . . . . . . . . . . . "A.Y."^^ . "Ahmed"^^ . "A.Y. Ahmed"^^ . . "M.N.M."^^ . "Saad"^^ . "M.N.M. Saad"^^ . . "J.O."^^ . "Dennis"^^ . "J.O. Dennis"^^ . . "M.H.M."^^ . "Khir"^^ . "M.H.M. Khir"^^ . . . . . "HTML Summary of #2699 \n\nFinite element analysis of a mass-sensitive CMOS-MEMS resonator using CoventorWare simulation software\n\n" . "text/html" . .