relation: https://khub.utp.edu.my/scholars/2699/
title: Finite element analysis of a mass-sensitive CMOS-MEMS resonator using CoventorWare simulation software
creator: Ahmed, A.Y.
creator: Dennis, J.O.
creator: Khir, M.H.M.
creator: Saad, M.N.M.
description: The finite element analysis of a mass-sensitive CMOS-MEMS resonator using architect is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the absorption/adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. CoventorWare simulation software is used to design and simulate the micromachined resonator gas sensing platform/membrane. From simulation, the resonant frequency of the resonator is found to be 6.45 kHz and 23 kHz for mode 1 and mode 2 (in y and z direction), respectively. The frequency increases with decrease in the length of the beam. On the other hand the frequency decreases with increasing mass on the top of the CMOS-MEMS resonator. The sensitivity is determined to be 0.18 Hz/pg. © 2011 IEEE.
date: 2012
type: Conference or Workshop Item
type: PeerReviewed
identifier:   Ahmed, A.Y. and Dennis, J.O. and Khir, M.H.M. and Saad, M.N.M.  (2012) Finite element analysis of a mass-sensitive CMOS-MEMS resonator using CoventorWare simulation software.  In: UNSPECIFIED.     
relation: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84867976711&doi=10.1109%2fICIAS.2012.6306119&partnerID=40&md5=6cdeb1aeca93549a07eae066e0f778d5
relation: 10.1109/ICIAS.2012.6306119
identifier: 10.1109/ICIAS.2012.6306119