?url_ver=Z39.88-2004&rft_id=10.1109%2FICIAS.2012.6306119&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aufirst=A.Y.&rft.au=Ahmed%2C+A.Y.&rft.aulast=Ahmed&rft.isbn=9781457719677&rft.date=2012&rft.title=Finite+element+analysis+of+a+mass-sensitive+CMOS-MEMS+resonator+using+CoventorWare+simulation+software&rft.genre=proceeding