@inproceedings{scholars2699,
           title = {Finite element analysis of a mass-sensitive CMOS-MEMS resonator using CoventorWare simulation software},
         address = {Kuala Lumpur},
             doi = {10.1109/ICIAS.2012.6306119},
            note = {cited By 1; Conference of 2012 4th International Conference on Intelligent and Advanced Systems, ICIAS 2012 ; Conference Date: 12 June 2012 Through 14 June 2012; Conference Code:93534},
          volume = {2},
           pages = {780--783},
         journal = {ICIAS 2012 - 2012 4th International Conference on Intelligent and Advanced Systems: A Conference of World Engineering, Science and Technology Congress (ESTCON) - Conference Proceedings},
            year = {2012},
            isbn = {9781457719677},
          author = {Ahmed, A. Y. and Dennis, J. O. and Khir, M. H. M. and Saad, M. N. M.},
        abstract = {The finite element analysis of a mass-sensitive CMOS-MEMS resonator using architect is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the absorption/adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. CoventorWare simulation software is used to design and simulate the micromachined resonator gas sensing platform/membrane. From simulation, the resonant frequency of the resonator is found to be 6.45 kHz and 23 kHz for mode 1 and mode 2 (in y and z direction), respectively. The frequency increases with decrease in the length of the beam. On the other hand the frequency decreases with increasing mass on the top of the CMOS-MEMS resonator. The sensitivity is determined to be 0.18 Hz/pg. {\^A}{\copyright} 2011 IEEE.},
        keywords = {Active material; Analyte molecules; CMOS-MEMS; CoventorWare; Gas sensing; Gaseous species; Micro resonators; Micromachined; Simulation software; Z-directions, Finite element method; Microelectromechanical devices; Natural frequencies; Resonators, Computer software},
             url = {https://www.scopus.com/inward/record.uri?eid=2-s2.0-84867976711&doi=10.1109\%2fICIAS.2012.6306119&partnerID=40&md5=6cdeb1aeca93549a07eae066e0f778d5}
}