TY  - CONF
ID  - scholars266
TI  - Nano-porous polysilicon fabrication for micro electro mechanical system (MEMS) drug delivery device
SP  - 329
KW  - Atomic force microscopy; Biocompatibility; Biomedical engineering; Controlled drug delivery; Drug delivery; Drug dosage; Etching; Fabrication; Hydrofluoric acid; Polycrystalline materials; Polysilicon; Porosity; Scanning electron microscopy; Targeted drug delivery; Topography
KW  -  Biodegra-dable materials; Drug delivery devices; Implantable drug delivery; Micro electromechanical system (MEMS); Nanoporous structures; Porous polysilicon; Porous structures; Stain etching
KW  -  MEMS
N1  - cited By 0; Conference of 3rd Kuala Lumpur International Conference on Biomedical Engineering, Biomed 2006 ; Conference Date: 11 December 2006 Through 14 December 2006; Conference Code:118209
N2  - Porous polysilicon is a biocompatible, non-toxic and biodegradable material, thus making it a suitable material to be implanted into human body as a drug delivery device. In this study, the method of stain etching in solution consists of HF, HNO3 and H2O in a ratio of 1:3:5 by volume has been used to create the nano-porous structures. The etching time was less than 30 seconds on a LPCVD polysilicon with sheet resistance of ~28 Ω/sq. The topography of the surface was then investigated by Scanning Electron Microscope (SEM) and Atomic Force Microscope (AFM). The resulting porous structure also exhibits a photoluminescence (PL) peak at around 700nm. The fabricated porous polysilicon is suitable as the material for an implantable drug delivery device, which offers significant advantages such as the ability to avoid dose dumping and providing patients with the required drug dosage over an extended period of time. © Springer-Verlag Berlin Heidelberg 2007.
AV  - none
EP  - 333
VL  - 15
A1  - Mohmad, S.B.
A1  - Chau, C.F.
A1  - Melvin, T.
A1  - Atri, S.
A1  - Kaminski, C.
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-84928888144&doi=10.1007%2f978-3-540-68017-8_84&partnerID=40&md5=a93dc13fa34d3a0aefd3babab92dbe0c
PB  - Springer Verlag
SN  - 16800737
Y1  - 2007///
ER  -