?url_ver=Z39.88-2004&rft_id=10.1007%2F978-3-540-68017-8%E2%82%88%E2%82%84&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.aufirst=S.B.&rft.au=Mohmad%2C+S.B.&rft.aulast=Mohmad&rft.date=2007&rft.title=Nano-porous+polysilicon+fabrication+for+micro+electro+mechanical+system+(MEMS)+drug+delivery+device&rft.isbn=9783540680161&rft.issn=16800737&rft.genre=proceeding