eprintid: 2567
rev_number: 2
eprint_status: archive
userid: 1
dir: disk0/00/00/25/67
datestamp: 2023-11-09 15:50:48
lastmod: 2023-11-09 15:50:48
status_changed: 2023-11-09 15:43:48
type: conference_item
metadata_visibility: show
creators_name: Ahmed, A.Y.
creators_name: Dennis, J.O.
creators_name: Khir, M.H.Md.
creators_name: Mohamad Saad, M.N.
title: Simulation and modeling the effect of temperature on resonant frequency of a CMOS-MEMS resonator
ispublished: pub
note: cited By 4; Conference of 2nd International Conference on Fundamental and Applied Sciences 2012, ICFAS 2012 ; Conference Date: 12 June 2012 Through 14 June 2012
abstract: Simulation and modeling of the effect of temperature on resonant frequency of resonator that is maintained at high temperature (100 to 300°C) by a heater element using Coventor Ware software is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator due to change in mass induced by the adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator. The theoretical resonant frequency is found to be 20.1 kHz. The frequency decreased from 20116.14 Hz to 19928.98 Hz with increasing temperature from 25°C to 300°C corresponding to a decrease in spring constant from 543.16 N/m to 533.1 N/m. The uniformity of the temperature distribution on the membrane area of the microresonator is also investigated and the temperature gradient is found to be 0.003°C/μm, which indicates a highly homogeneous temperature. © 2012 American Institute of Physics.
date: 2012
official_url: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84874154243&doi=10.1063%2f1.4757433&partnerID=40&md5=c8d311983f8151ecf7ef6e57119ec973
id_number: 10.1063/1.4757433
full_text_status: none
publication: AIP Conference Proceedings
volume: 1482
place_of_pub: Kuala Lumpur
pagerange: 32-36
refereed: TRUE
isbn: 9780735410947
issn: 0094243X
citation:   Ahmed, A.Y. and Dennis, J.O. and Khir, M.H.Md. and Mohamad Saad, M.N.  (2012) Simulation and modeling the effect of temperature on resonant frequency of a CMOS-MEMS resonator.  In: UNSPECIFIED.