%0 Conference Paper
%A Ahmed, A.Y.
%A Dennis, J.O.
%A Khir, M.H.Md.
%A Mohamad Saad, M.N.
%D 2012
%F scholars:2567
%P 32-36
%R 10.1063/1.4757433
%T Simulation and modeling the effect of temperature on resonant frequency of a CMOS-MEMS resonator
%U https://khub.utp.edu.my/scholars/2567/
%V 1482
%X Simulation and modeling of the effect of temperature on resonant frequency of resonator that is maintained at high temperature (100 to 300°C) by a heater element using Coventor Ware software is presented in this paper. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator due to change in mass induced by the adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator. The theoretical resonant frequency is found to be 20.1 kHz. The frequency decreased from 20116.14 Hz to 19928.98 Hz with increasing temperature from 25°C to 300°C corresponding to a decrease in spring constant from 543.16 N/m to 533.1 N/m. The uniformity of the temperature distribution on the membrane area of the microresonator is also investigated and the temperature gradient is found to be 0.003°C/μm, which indicates a highly homogeneous temperature. © 2012 American Institute of Physics.
%Z cited By 4; Conference of 2nd International Conference on Fundamental and Applied Sciences 2012, ICFAS 2012 ; Conference Date: 12 June 2012 Through 14 June 2012