TY  - CONF
VL  - 1482
AV  - none
SP  - 673
CY  - Kuala Lumpur
EP  - 676
A1  - Ahmed, A.Y.
A1  - Dennis, J.O.
A1  - Md. Khir, M.H.
A1  - Mohamad Saad, M.N.
UR  - https://www.scopus.com/inward/record.uri?eid=2-s2.0-84874160816&doi=10.1063%2f1.4757556&partnerID=40&md5=c21b2fcb9c4cfc1d9a577a365292ecd6
N1  - cited By 3; Conference of 2nd International Conference on Fundamental and Applied Sciences 2012, ICFAS 2012 ; Conference Date: 12 June 2012 Through 14 June 2012
ID  - scholars2554
Y1  - 2012///
TI  - Design and simulation of mass-sensitive gas sensor based on CMOS-MEMS resonator
SN  - 0094243X
N2  - This paper is mainly focused on the design and simulation of a micromachined CMOS-MEMS resonator for gas sensing applications. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. Coventor Ware simulation software is used to design and simulate the micromachined microresonator gas sensing platforms. Simulation results show a resonant frequency of 20162.3 Hz for the resonator. © 2012 American Institute of Physics.
ER  -