<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "Design and simulation of mass-sensitive gas sensor based on CMOS-MEMS resonator"^^ . "This paper is mainly focused on the design and simulation of a micromachined CMOS-MEMS resonator for gas sensing applications. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. Coventor Ware simulation software is used to design and simulate the micromachined microresonator gas sensing platforms. Simulation results show a resonant frequency of 20162.3 Hz for the resonator. © 2012 American Institute of Physics."^^ . "2012" . . "1482" . . "AIP Conference Proceedings"^^ . . . "0094243X" . . . . . . . . . . . . . . . . "A.Y."^^ . "Ahmed"^^ . "A.Y. Ahmed"^^ . . "M.N."^^ . "Mohamad Saad"^^ . "M.N. Mohamad Saad"^^ . . "J.O."^^ . "Dennis"^^ . "J.O. Dennis"^^ . . "M.H."^^ . "Md. Khir"^^ . "M.H. Md. Khir"^^ . . . . . "HTML Summary of #2554 \n\nDesign and simulation of mass-sensitive gas sensor based on CMOS-MEMS resonator\n\n" . "text/html" . .