%0 Conference Paper
%A Ahmed, A.Y.
%A Dennis, J.O.
%A Md. Khir, M.H.
%A Mohamad Saad, M.N.
%D 2012
%F scholars:2554
%P 673-676
%R 10.1063/1.4757556
%T Design and simulation of mass-sensitive gas sensor based on CMOS-MEMS resonator
%U https://khub.utp.edu.my/scholars/2554/
%V 1482
%X This paper is mainly focused on the design and simulation of a micromachined CMOS-MEMS resonator for gas sensing applications. The principle of detection of the gaseous species is based on the change in resonant frequency of the microresonator as a result of the adsorption of an analyte molecule onto the surface of the active material deposited on the microresonator resulting into a change of the mass of the microresonator device. Coventor Ware simulation software is used to design and simulate the micromachined microresonator gas sensing platforms. Simulation results show a resonant frequency of 20162.3 Hz for the resonator. © 2012 American Institute of Physics.
%Z cited By 3; Conference of 2nd International Conference on Fundamental and Applied Sciences 2012, ICFAS 2012 ; Conference Date: 12 June 2012 Through 14 June 2012